A gateway that transmits production data from a variety of PCSs (pump, chiller, scrubber, heating jacket) for semiconductor processes to upper systems in real time by gathering and tagging the data.
Various equipment and protocols supported
Collects data of up to 15 Ethernet devices for equipment such as chillers and scrubbers
Collects data of 20 serial communication devices, such as heating jackets and pumps
Stores error logs, and automatic recovery in the case of system failure (reset/health check)
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Wireless PCS Driver
A gateway that gathers and tags production data from various PCSs (pump, chiller, scrubber, heating jacket) for semiconductor processes and transmits it in real time to the upper system via WI-FI communication.
Wi-Fi communication supported
Various equipment and protocols supported
Collects data of up to 15 Ethernet devices for equipment such as chillers and scrubbers
Collects data of 20 serial communication devices, such as heating jackets and pumps