플루토솔루션 - IoT/IIoT 솔루션 전문기업

Key Feature

Main features of the FOUP Environment Monitoring Solution

Main Features of the Optinal Management Service for Monitoring the FOUP Environment

Collects stable real-time data
Provides a monitoring UI that makes it possible to check the quality in real time
Immediate alert when an abnormal signal occurs

FOUP Environment Monitoring Solution

Embedded Smart Solution

As a sensor module for environmental analysis in the highly clean space in the FOUP (front opening unified pod) for semiconductors using the smart FOUP sensor module, it is installed inside the FOUP to safely collect necessary environmental data on vibration and temperature/humidity in the FOUP.

Related Products

Semiconductor FAB
FOUP (Front Opening Universl Pod) Semiconductor wafer transfer equipment (container) that allows wafers to be transferred while opening or closing the door
Data Platform / Monitoring System

FOUP Environment Monitoring Solution

External Smart Solution

As a sensor module for environmental analysis in the highly clean space in FOUP (Front Opening Unified Pod) for semiconductors using the smart FOUP sensor module, it can be installed outside the FOUP to safely collect necessary environmental data on vibration and temperature/humidity in the FOUP.

Related Products

Semiconductor FAB
FOUP (Front Opening Universl Pod) Semiconductor wafer transfer equipment (container) that allows wafers to be transferred while opening or closing the door
Data Platform / Monitoring System

FOUP Environment Monitoring Solution

N2 Purge Quality Monitoring Solution

The N2 purge quality monitoring solution checks the quality of N2 purge in real time by collecting the flow rate of N2 gas flowing into the FOUP and the particle size and quantity data.
It is composed of a flow FOUP, a particle FOUP, and a wireless charging station.