A solution that measures and transmits the temperatures of internal wiring devices, such as the equipment front end module (EFEM, semiconductor transmitting equipment), and power cables and vulnerable points in real time, and monitors abnormally high temperatures in order to prevent carbonation from forming in advance.
An oil color monitoring solution that can measure and collect oil color through the oil window in the pump using a color sensor, and monitor it through the higher-level server.
It prevents pump failure, thereby preventing wafer loss due to system down by allowing oil to be replaced in a timely manner.
A solution for monitoring temperature in the operating environment of high-temperature and low-temperature equipment, such as heating jackets, that helps secure the maintenance of equipment and the quality of produced products.
Solution for Monitoring Equipment Used for the Factory Production Process
As a solution for monitoring the operation status of equipment from vacuum pumps to chillers, scrubbers, and heating jackets used in the factory production process, the ETOS Gateway is a data gateway for integrated monitoring of ancillary equipment in the production process using various communication methods.
It is possible to add or change protocols, so you can monitor and expand a variety of ancillary equipment items without purchasing new products.
