Korean
FOUP Environment Monitoring System
We are a company that provides customized consulting and solutions to improve customer value based on AIoT technology.
Built-in and External Smart FOUP
    01
  • Built-in Smart FOUP
    A wireless sensor module built in the FOUP to monitor the environment in the FOUP.
    • Mounted in a wafer slot in the FOUP
    • Collects temperature/humidity/acceleration sensor data in the FOUP
    • Transmits sensor/log data to the higher-level server
    • Synchronizes the higher-level server time and interlockes the set value
    • Remote F/W update
    • Wireless charging / Magnetic reset
    • Monitores status through the APP
    02
  • External Smart FOUP
    A wireless sensor module installed outside the FOUP to monitor the environment within the FOUP.
    • Allows the FOUP to be installed externally (removable)
    • Collects temperature/humidity/acceleration sensor data in the FOUP
    • Transmits sensor/log data to the higher-level server
    • Synchronizes the higher-level server time and interlockes the set value
    • Remote F/W update
    • Wireless charging / Magnetic reset
    • Monitores status through the APP