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FOUP Environment Monitoring System
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FOUP Environment Monitoring System
We are a company that provides customized consulting and solutions to improve customer value based on AIoT technology.
Built-in and External Smart FOUP
N2Q FOUP for monitoring the N2 purge status in the FOUP
Built-in and External Smart FOUP
Inquiry
01
Built-in Smart FOUP
A wireless sensor module built in the FOUP to monitor the environment in the FOUP.
Mounted in a wafer slot in the FOUP
Collects temperature/humidity/acceleration sensor data in the FOUP
Transmits sensor/log data to the higher-level server
Synchronizes the higher-level server time and interlockes the set value
Remote F/W update
Wireless charging / Magnetic reset
Monitores status through the APP
02
External Smart FOUP
A wireless sensor module installed outside the FOUP to monitor the environment within the FOUP.
Allows the FOUP to be installed externally (removable)
Collects temperature/humidity/acceleration sensor data in the FOUP
Transmits sensor/log data to the higher-level server
Synchronizes the higher-level server time and interlockes the set value
Remote F/W update
Wireless charging / Magnetic reset
Monitores status through the APP