Collects the results of measuring the flow, pressure, and seating level in the FOUP for the purpose of checking the quality of N2 gas flowing into the FOUP and transmits them to the server.
Measures N2 flow rate, internal pressure in the FOUP, and the seating levels on the X and Y axes
Displays sensor values and battery charges externally
Measures N2 supply flow in the FOUP
Measures pressure in the FOUP
Wireless transfer of sensor data and battery information (connection to the Wi-Fi network)
Wired/wireless charging and battery replacement (with separate charging modules)
Can check the battery level.
02
N2Q Particle FOUP
Measures the quantity by particle size and the flow of the bypassing N2 gas in the FOUP, collectd the results of measuring seating levels in the FOUP, and delivers the results to a server for the purpose of checking the quality of N2 gas flowing in the FOUP.
Measures N2 particles, the flow rates of branched pipes, and the seating levels on the X and Y axes
Displays sensor values and battery charges externally
Measures the amount of N2 particles in the FOUP
Indicates the status of particle detection
Wireless transfer of sensor data and battery information (Connection to Wi-Fi network)
Wired/wireless charging and battery replacement (with separate charging modules)
Can check the battery level.
03
N2Q Wireless Charging Station
The N2Q wireless charging station wirelessly charges the lithium-ion battery packs embedded in the flow FOUP and particle FOUP.
Can jointly use the N2Q flow FOUP and N2Q particle FOUP.
